diff --git a/vllm/compilation/decorators.py b/vllm/compilation/decorators.py
index f97467ad6..68be29cca 100644
--- a/vllm/compilation/decorators.py
+++ b/vllm/compilation/decorators.py
@@ -575,7 +575,11 @@ def _support_torch_compile(
         logger.info("saving AOT compiled function to %s", self._aot_compilation_path)
         try:
             os.makedirs(self._aot_cache_dir, exist_ok=True)
-            self.aot_compiled_fn.save_compiled_function(self._aot_compilation_path)
+            # File saving should be atomic, so we will save to a temporary location
+            # first. Should be upstreamed to PyTorch 2.12 as well.
+            tmp_file = f"{self._aot_compilation_path}.{os.getpid()}.tmp"
+            self.aot_compiled_fn.save_compiled_function(tmp_file)
+            os.replace(tmp_file, self._aot_compilation_path)
             logger.info("saved AOT compiled function to %s", self._aot_compilation_path)
         except Exception as e:
             logger.warning(